Chemical composition of samples
EDS analysis has become a powerful analytical technique used in various scientific fields and provides elemental analysis and chemical characterization of the sample.
EDS operates on the principle of characteristic X-ray emission. A sample that is bombarded with high-energy electrons in an electron microscope (SEM HITACHI SU3500) absorbs this energy, and the inner-shell electrons of the sample's atoms are ejected. When outer-shell electrons move to occupy vacant spots, they release energy in the form of X-rays. Since each element has a unique electronic structure, the energy of the emitted X-rays is distinct to each element. By detecting and measuring these energies, Energy Dispersive Spectroscopy (EDS) can identify and quantify the elements present in a sample.
In EDS, X-ray detectors capture the emitted X-rays and transform them into signals, which are then processed to generate an elemental spectrum. The spectrum shows peaks that correspond to specific energy levels, each linked to a particular element. This data, both qualitative and quantitative, enables researchers to analyze the elemental composition of any samples with great precision. The capability to examine the spatial distribution of elements at the nanoscale makes EDS an essential tool for advancing our understanding of complex structures.
Non-destructive analysis
Compatible with electron microscopy
High sensitivity to elements
Less sensitivity to light elements
Electron beam exposure on samples
Overlap in spectral peaks
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