Chemical Name
Tantalum Iodide
Chemical Formula
TaI5
Purity
99.99%
Composition
Size
-20 mesh
EINECS Number
238-742-4
Quantity Available
kg
CAS Number
14693-81-3
Status
Product ID
BETAI5200004N
Hazmat
Powder: UN3260, Class 8, PG III
Catalog Number
533
Description
Crystalline
Comments
Tantalum(V) iodide is used as a precursor in chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes to create tantalum-based diffusion barriers and high-k dielectric layers in semiconductor devices.
Used as a high-purity source material for the deposition of tantalum-containing thin films via thermal evaporation or specialized vapor phase transport techniques.
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