Hafnium Tantalum Oxide
PowderChemical Name
Chemical Formula
Purity
99.5%
Composition
Size
-200 mesh approx
EINECS Number
Quantity Available
10 kg
CAS Number
Status
Stock
Product ID
POHFTAO2002N5
Hazmat
Catalog Number
15345
Description
Comments
Single phase
Hafnium Tantalum Oxide is used as a sputtering target material to deposit high-k dielectric thin films for advanced gate insulators and capacitor applications.
Utilized in the production of high-refractive index layers for multilayer optical coatings due to its high thermal stability and wide bandgap.
Applied as a high-permittivity (high-k) gate dielectric material in CMOS technology to reduce leakage current while maintaining high capacitance.
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