Chemical Name
Aluminum Nitride Scandium Composite
Chemical Formula
AlN-Sc
Purity
99.9%
Composition
70/30 mole% AlN:Sc
Size
2 inch dia x 0.125 inch th.
EINECS Number
Quantity Available
pcs
CAS Number
Status
Product ID
SPALNSC2D3T3N
Hazmat
Catalog Number
17786
Description
Comments
Aluminum Nitride Scandium (ScAlN) composite targets are used in magnetron sputtering to deposit piezoelectric thin films for high-frequency bulk acoustic wave (BAW) and surface acoustic wave (SAW) filters.
Used as a high-performance piezoelectric material in the fabrication of micro-electromechanical systems (MEMS) and next-generation 5G radio frequency front-end components.
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