Chemical Name
Aluminum Nitride Scandium Composite
Chemical Formula
AlN-Sc
Purity
99.9%
Composition
57/43 mole% AlN:Sc
Size
2 inch dia x 0.125 inch th.
EINECS Number
Quantity Available
pcs
CAS Number
Status
Product ID
SPALNSC2D3T3N-1
Hazmat
Catalog Number
17788
Description
Comments
Aluminum Nitride Scandium (ScAlN) composite targets are used in magnetron sputtering to deposit piezoelectric thin films for high-frequency bulk acoustic wave (BAW) and surface acoustic wave (SAW) filters.
Used as a high-performance piezoelectric material in the fabrication of micro-electromechanical systems (MEMS) and next-generation 5G radio frequency front-end components.
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