Hafnium Aluminum Alloy
Sputtering TargetChemical Name
Chemical Formula
Purity
99.9%
Composition
90/10 at% Hf:Al
Size
200 mm x 150 mm x 6.35 mm th.
EINECS Number
Quantity Available
pcs
CAS Number
Status
Product ID
SPHFAL20015063N
Hazmat
Catalog Number
9948
Description
Comments
Hafnium aluminum alloy targets are used in physical vapor deposition to create thin films for high-k dielectric layers and diffusion barriers in microelectronic devices.
Used as an additive in superalloys to improve high-temperature oxidation resistance and grain boundary stability.
Utilized in the fabrication of advanced logic and memory chips where hafnium-based aluminates serve as high-permittivity gate dielectrics.
Loading COA files…