Hafnium Zirconium Oxide
Sputtering TargetChemical Name
Chemical Formula
Purity
99.9%
Composition
Hf0.5Zr0.5O2
Size
4 inch dia x 0.25 inch th.
EINECS Number
Quantity Available
pcs
CAS Number
Status
Product ID
SPHFZRO24D6T3N
Hazmat
Catalog Number
11910
Description
Comments
Hafnium Zirconium Oxide (HZO) is utilized as a high-k dielectric material in advanced CMOS logic and memory devices, particularly for its ferroelectric properties in non-volatile RAM.
HZO targets are used in magnetron sputtering processes to deposit thin films for microelectronic applications requiring precise control over the Hf:Zr ratio.
Used to create high-refractive index thin films with high laser-induced damage thresholds for multilayer optical interference coatings.
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