Chemical Name
Hafnium Zirconium Lanthanum Oxide
Chemical Formula
HfZrLaO2
Purity
99.9%
Composition
Hf/Zr/La (44/44/12 at%)
Size
1 inch dia x 0.25 inch th.
EINECS Number
Quantity Available
pcs
CAS Number
Status
Product ID
SPHZLO1D6T03N
Hazmat
Catalog Number
14284
Description
Comments
inred RD ~70%
Hafnium Zirconium Lanthanum Oxide is used as a high-purity sputtering target material to deposit high-k dielectric thin films for advanced gate stacks and memory devices.
This complex oxide is utilized in semiconductor fabrication as a high-permittivity gate insulator to reduce leakage current in scaled-down transistor architectures.
Applied via physical vapor deposition to create thin films with specific refractive indices and high thermal stability for precision optical components.
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