Lithium Phosphorus Oxynitride

LiPON is commonly deposited as a thin-film solid electrolyte via radio-frequency (RF) magnetron sputtering of a lithium orthophosphate target in a nitrogen plasma environment.

LiPON serves as a high-performance solid-state electrolyte material for thin-film lithium-ion batteries due to its excellent electrochemical stability and lithium-ion conductivity.

Used as a protective interlayer or solid electrolyte in thin-film batteries to prevent dendrite growth and stabilize the interface between the electrodes.