Molybdenum Copper Silicon
Sputtering TargetChemical Name
Chemical Formula
Purity
99.95%
Composition
Size
3 inch dia x 0.25 inch th.
EINECS Number
Quantity Available
pcs
CAS Number
Status
Product ID
SPMOCUSI3D6T3N5
Hazmat
Catalog Number
4590
Description
Comments
Composite (90/5/5at%)
Molybdenum copper silicon alloys are utilized as sputtering target materials to deposit thin films that require a specific balance of thermal stability, electrical conductivity, and adhesion in microelectronic applications.
Used in the fabrication of diffusion barriers and contact layers where the combination of molybdenum's refractory nature, copper's conductivity, and silicon's compatibility with substrate materials is required.
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