Chemical Name
Nickel Platinum Alloy )
Chemical Formula
NiPt
Purity
99.95%
Composition
95:5 at%
Size
3 inch dia x 0.125 inch th.
EINECS Number
Quantity Available
pcs
CAS Number
Status
Product ID
SPNIPT3D3T3N5
Hazmat
Catalog Number
2661
Description
Comments
Nickel Platinum alloy targets are used in magnetron sputtering to deposit thin films for the formation of nickel-platinum silicide contacts in semiconductor device fabrication.
Used in the silicidation process to improve the thermal stability of nickel silicide contacts in advanced CMOS nodes.
The addition of platinum to nickel enhances the corrosion resistance and high-temperature stability of the resulting alloy system.
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