Chemical Name
Ruthenium Oxide
Chemical Formula
RuO2
Purity
99.95%
Composition
Size
3 inch dia x 0.125 inch th.
EINECS Number
Quantity Available
pcs
CAS Number
12036-10-1
Status
Product ID
SPRUO23D3T3N5
Hazmat
UN1479 PGII 5.1
Catalog Number
6674
Description
Comments
inred Fragile, Bonding required
Ruthenium oxide is used as a sputtering target material to deposit conductive thin films in microelectronic applications, such as electrode layers for ferroelectric memory devices.
Used as a diffusion barrier and gate electrode material in CMOS technology due to its high thermal stability and low electrical resistivity.
Applied in the fabrication of transparent conducting films and as a component in electrochromic devices.
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