Silicon Phosphorus
Sputtering TargetChemical Name
Chemical Formula
Purity
99.9%
Composition
Si/P (1/1mol%)
Size
3 inch dia x 0.125 inch th.
EINECS Number
Quantity Available
pcs
CAS Number
Status
Product ID
SPSIP3D3T003N
Hazmat
Powder, 4.1 , UN1346 , PGIII
Catalog Number
19001
Description
Comments
Silicon phosphide is utilized as a dopant source and in the synthesis of phosphorus-doped silicon layers for advanced semiconductor device fabrication.
Silicon phosphide targets are used in sputtering processes to deposit thin films for microelectronic and optoelectronic applications requiring specific phosphorus concentrations.
Silicon-phosphorus compounds are researched as high-capacity anode materials for lithium-ion batteries due to their ability to mitigate volume expansion during lithiation.
Loading COA files…