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Tantalum Nitride

Sputtering Target

Tags: Nitride Refractory Material Specialty Inorganics 3D Printing Sputtering

Product Specifications

Chemical Name

Tantalum Nitride

Chemical Formula

TaN

Purity

99.5%

Composition

Size

3 inch dia x 0.25 inch th.

EINECS Number

234-788-4

Quantity Available

pcs

CAS Number

12033-62-4

Status

General SpecificationsApplicationsSafety and ShippingCertificates of Analysis (COA)

Element Name

Tantalum Nitride

Symbol

TaN

Atomic Number

Atomic Weight

194.95 g/mol

Melting Point

3090 °C

Boiling Point

Density

Product ID

SPTAN3D6T02N5

Hazmat

Not Hazardous for transportation.

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Crystal Structure

Hexagonal

Color / Appearance

Black or dark grey powder

Thermal Conductivity

9.54 W/(m·K)

Electrical Resistivity

135-250 µΩ·cm

Coefficient of Thermal Expansion

3.6 x 10⁻⁶/K

Neutron Cross Section

Electron Configuration

This Product

SPTAN3D6T02N5

Form

Sputtering Target

Size

3 inch dia x 0.25 inch th.

Quantity Available

pcs

info

Semiconductors

Tantalum nitride is widely used as a diffusion barrier layer between copper interconnects and silicon substrates to prevent copper migration into the dielectric.

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Sputtering

Tantalum nitride targets are used in physical vapor deposition (PVD) processes to create thin film resistors and hard coatings.

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Refractory chemicals

Due to its high melting point and chemical stability, it is utilized in high-temperature environments and as a wear-resistant coating.

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HazMat Classification

Not Hazardous for transportation.

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Documentation

Safety Data Sheet (SDS) and Certificate of Analysis (COA) available for download. GHS-compliant labeling provided with all shipments.

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Shipping

Shipped via FedEx Ground or UPS. Hazmat surcharges apply. International orders may require export compliance review. Custom packaging available.

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Quality Assurance

All products supplied with lot-specific COA including ICP-OES elemental analysis, XRD phase identification, and particle size distribution data.

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Certificates of Analysis (COA)

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Tantalum Nitride

Product Specifications

Semiconductors

Sputtering

Refractory chemicals

HazMat Classification

Documentation

Shipping

Quality Assurance

Certificates of Analysis (COA)

Don’t see the Right Version?

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