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Titanium Silicide

Sputtering Target

Tags: Silicide Refractory Material Specialty Inorganics Sputtering

Product Specifications

Chemical Name

Titanium Silicide

Chemical Formula

TiSi2

Purity

99.95%

Composition

Size

3 inch dia x 0.125 inch th.

EINECS Number

234-904-3

Quantity Available

pcs

CAS Number

12039-83-7

Status

Product ID

SPTISI23D3T3N5

General SpecificationsApplicationsSafety and ShippingCertificates of Analysis (COA)

Element Name

Titanium Silicide

Symbol

TiSi2

Atomic Number

Atomic Weight

104.04 g/mol

Melting Point

1540 °C

Boiling Point

Density

Hazmat

Powder: Class 4.1, UN3178, PG III

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Crystal Structure

Orthorhombic

Color / Appearance

Silver-gray metallic powder

Thermal Conductivity

25 W/(m·K)

Electrical Resistivity

13-25 μΩ·cm

Coefficient of Thermal Expansion

10.5 x 10^-6 /K

Neutron Cross Section

Electron Configuration

This Product

SPTISI23D3T3N5

Form

Sputtering Target

Size

3 inch dia x 0.125 inch th.

Quantity Available

pcs

info

Semiconductors

Titanium silicide is widely used as a contact material and for interconnects in CMOS fabrication due to its low electrical resistivity and high thermal stability.

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Sputtering

Used as a sputtering target material to deposit thin films for microelectronic circuits and protective coatings.

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Refractory chemicals

Utilized for its high melting point and oxidation resistance in high-temperature structural applications and coatings.

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HazMat Classification

Powder: Class 4.1, UN3178, PG III

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Documentation

Safety Data Sheet (SDS) and Certificate of Analysis (COA) available for download. GHS-compliant labeling provided with all shipments.

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Shipping

Shipped via FedEx Ground or UPS. Hazmat surcharges apply. International orders may require export compliance review. Custom packaging available.

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Quality Assurance

All products supplied with lot-specific COA including ICP-OES elemental analysis, XRD phase identification, and particle size distribution data.

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Certificates of Analysis (COA)

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Titanium Silicide

Product Specifications

Semiconductors

Sputtering

Refractory chemicals

HazMat Classification

Documentation

Shipping

Quality Assurance

Certificates of Analysis (COA)

Don’t see the Right Version?

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