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Yttrium Oxyfluoride

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Tags: Fluoride Rare Earth Compounds Evaporant

Product Specifications

Chemical Name

Yttrium Oxyfluoride

Chemical Formula

YOF

Purity

99.9%

Composition

Y=71.75% O=12.91% F=15.33%

Size

< 5 mm

EINECS Number

Quantity Available

CAS Number

Status

5 kg

Product ID

GRYOF5000003N

Hazmat

Powder: 6.1, UN3288, PGIII

General SpecificationsApplicationsSafety and ShippingCertificates of Analysis (COA)

Element Name

Yttrium Oxyfluoride

Symbol

YOF

Atomic Number

Atomic Weight

Melting Point

1480 °C

Boiling Point

Density

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Crystal Structure

Rhombohedral

Color / Appearance

White powder

Thermal Conductivity

Electrical Resistivity

Coefficient of Thermal Expansion

Neutron Cross Section

Electron Configuration

This Product

GRYOF5000003N

Composition

Y=71.75% O=12.91% F=15.33%

Quantity Available

Catalog Number

13560

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Sputtering

Yttrium oxyfluoride is used as a sputtering target material to create plasma-resistant coatings for semiconductor processing equipment components.

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Thermal spray powder

Applied via atmospheric plasma spray to provide high-performance erosion and corrosion resistance in halogen-based plasma environments.

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Optical coating

Utilized in thin-film deposition to produce protective layers with specific refractive indices and high transparency in the UV to IR range.

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Semiconductors

Used as a high-purity coating material for chamber parts to prevent particle contamination during etching and deposition processes.

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HazMat Classification

Powder: 6.1, UN3288, PGIII

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Documentation

Safety Data Sheet (SDS) and Certificate of Analysis (COA) available for download. GHS-compliant labeling provided with all shipments.

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Shipping

Shipped via FedEx Ground or UPS. Hazmat surcharges apply. International orders may require export compliance review. Custom packaging available.

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Quality Assurance

All products supplied with lot-specific COA including ICP-OES elemental analysis, XRD phase identification, and particle size distribution data.

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Certificates of Analysis (COA)

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Yttrium Oxyfluoride

Product Specifications

Sputtering

Thermal spray powder

Optical coating

Semiconductors

HazMat Classification

Documentation

Shipping

Quality Assurance

Certificates of Analysis (COA)

Don’t see the Right Version?

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