Aluminum Suboxide
Sputtering TargetChemical Name
Chemical Formula
Purity
99.9%
Composition
Size
3 inch dia x 0.125 inch th.
EINECS Number
Quantity Available
pcs
CAS Number
14457-64-8
Status
Product ID
SPALOX3D3T03N
Hazmat
Catalog Number
8438
Description
Comments
AlO, Al2O
Aluminum suboxide is utilized as a target material in reactive sputtering processes to create thin films with specific stoichiometric control for barrier layers and optical coatings.
Used as a precursor material to deposit thin films with high refractive indices and controlled transparency in multi-layer optical interference filters.
Aluminum suboxide serves as a specialized evaporation source for physical vapor deposition (PVD) to produce oxygen-deficient alumina films.
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