DUV

DUV (Deep Ultraviolet) refers to the region of the ultraviolet (UV) spectrum with wavelengths typically between 200 nm and 300 nm. This spectral range lies between the UV-C and near-UV (or UV-B) regions and is especially important in high-tech and scientific applications due to its high photon energy and strong interaction with materials.

Key features of DUV:

Wavelength range: ~200–300 nm
High photon energy, capable of breaking molecular bonds
Strong absorption by many materials, including polymers and biological matter

Common applications include:

Semiconductor photolithography (deep-UV lithography for advanced chip fabrication)
Surface cleaning and modification
Disinfection and sterilization
Spectroscopy and fluorescence excitation

DUV light sources include excimer lasers (like KrF at 248 nm, ArF at 193 nm), mercury lamps, and DUV LEDs. Because DUV radiation can degrade or damage materials and poses safety risks to skin and eyes, its use requires proper shielding and controls.