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Ruthenium Silicide

Sputtering Target

Tags: Silicide Refractory Material Specialty Inorganics

Product Specifications

Chemical Name

Ruthenium Silicide

Chemical Formula

Ru2Si3

Purity

99.95%

Composition

Size

4 inch dia x 0.125 inch th.

EINECS Number

Quantity Available

pcs

CAS Number

Status

Product ID

SPRU2SI34D3T3N5

Hazmat

Catalog Number

General SpecificationsApplicationsSafety and ShippingCertificates of Analysis (COA)

Element Name

Ruthenium Silicide

Symbol

Ru2Si3

Atomic Number

Atomic Weight

286.37 g/mol

Melting Point

approx. 1710 °C

Boiling Point

Density

downloadSDS

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Crystal Structure

Orthorhombic

Color / Appearance

Gray metallic solid

Thermal Conductivity

Electrical Resistivity

Coefficient of Thermal Expansion

Neutron Cross Section

Electron Configuration

This Product

SPRU2SI34D3T3N5

Form

Sputtering Target

Size

4 inch dia x 0.125 inch th.

Quantity Available

pcs

Catalog Number

10223

info

Semiconductors

Ruthenium silicide is utilized as a high-temperature semiconducting material and in the formation of ohmic contacts or Schottky barriers in microelectronic devices.

info

Sputtering

Used as a sputtering target material to deposit thin films for microelectronic components and protective coatings requiring high thermal stability.

warning

HazMat Classification

Not classified as hazardous material.

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Documentation

Safety Data Sheet (SDS) and Certificate of Analysis (COA) available for download. GHS-compliant labeling provided with all shipments.

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Shipping

Shipped via FedEx Ground or UPS. Hazmat surcharges apply. International orders may require export compliance review. Custom packaging available.

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Quality Assurance

All products supplied with lot-specific COA including ICP-OES elemental analysis, XRD phase identification, and particle size distribution data.

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Certificates of Analysis (COA)

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Ruthenium Silicide

Product Specifications

Semiconductors

Sputtering

HazMat Classification

Documentation

Shipping

Quality Assurance

Certificates of Analysis (COA)

Don’t see the Right Version?

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