Silicon Nitride
Sputtering TargetChemical Name
Chemical Formula
Purity
99.5%
Composition
Size
300 mm dia x 8.5 mm th.
EINECS Number
234-796-8
Quantity Available
pcs
CAS Number
12033-89-5
Status
Product ID
SPSI3N4300D8T2N5
Hazmat
Catalog Number
8499
Description
Comments
Gray, no binder, Non conductive RD~55-60%
Silicon nitride is used as a passivation layer, diffusion mask, and dielectric material in integrated circuit manufacturing due to its excellent barrier properties against water and sodium ions.
Silicon nitride targets are utilized in physical vapor deposition to create hard, wear-resistant, and chemically inert thin films for microelectronic and optical applications.
Due to its high thermal stability and resistance to thermal shock, silicon nitride is used in high-stress refractory components such as crucible liners and engine parts.
It is applied as an anti-reflective coating and a protective layer in optical devices and solar cells because of its tunable refractive index and durability.
Silicon nitride nanopowders are used to produce high-strength nanocomposites and specialized ceramic components with enhanced mechanical properties.
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