Tantalum Pentoxide
Sputtering TargetChemical Name
Chemical Formula
Purity
99.99%
Composition
Size
10 inch dia x 6 mm th.
EINECS Number
215-238-2
Quantity Available
pcs
CAS Number
1314-61-0
Status
Product ID
SPTA2O510D6T4N5-1
Hazmat
Catalog Number
2219
Description
Comments
RD~95%
Tantalum pentoxide is used as a sputtering target material to create high-refractive-index thin films for interference filters and anti-reflective coatings.
Utilized in multilayer optical coatings due to its high refractive index, low absorption, and wide transparency range from near-UV to IR.
Used as a source material in physical vapor deposition processes to produce dielectric layers for capacitors and optical components.
Applied as a high-k dielectric material in the fabrication of dynamic random-access memory (DRAM) capacitors and gate insulators.
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