Tantalum Suboxide
Sputtering TargetChemical Name
Chemical Formula
Purity
99.9%
Composition
Size
2 inch dia x 0.125 inch th.
EINECS Number
Quantity Available
pcs
CAS Number
12036‐14‐5
Status
Product ID
SPTAO22D3T03N
Hazmat
Catalog Number
9468
Description
Comments
Tantalum suboxide is utilized as a sputtering target material to create thin films with specific refractive indices and oxygen deficiencies for optical and electronic applications.
Used in the deposition of high-refractive index layers where controlled stoichiometry of the tantalum oxide film is required for interference filters.
Acts as a source material for physical vapor deposition processes to produce oxygen-depleted tantalum oxide coatings.
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