Hafnium Zirconium Oxide
Sputtering TargetChemical Name
Chemical Formula
Purity
99.9%
Composition
1/1 mol% HfO2:ZrO2
Size
1 inch dia x 0.25 inch th.
EINECS Number
Quantity Available
pcs
CAS Number
Status
Product ID
SPHFZRO1D6T3N
Hazmat
Catalog Number
11644
Description
Comments
Hafnium Zirconium Oxide (HZO) is utilized as a high-k dielectric material and for its ferroelectric properties in advanced CMOS logic and non-volatile memory devices.
HZO targets are used in magnetron sputtering processes to deposit thin films for microelectronic components requiring precise ferroelectric layers.
Used to create high-refractive index layers in multilayer optical coatings for laser applications and specialized mirrors.
Loading COA files…