Hafnium Zirconium Oxide
Sputtering TargetChemical Name
Chemical Formula
Purity
99.95%
Composition
1/1 mol% HfO2:ZrO2
Size
2 inch dia x 0.125 inch th.
EINECS Number
Quantity Available
pcs
CAS Number
Status
Product ID
SPHFZRO2D3T3N5-1
Hazmat
Catalog Number
12426
Description
Comments
Hafnium Zirconium Oxide (HZO) is utilized as a high-k dielectric material and for its ferroelectric properties in advanced CMOS logic and non-volatile memory devices.
HZO targets are used in magnetron sputtering processes to deposit thin films for microelectronic components requiring precise ferroelectric layers.
Used to create high-refractive index layers in multilayer optical coatings for laser applications and specialized mirrors.
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