Hafnium Zirconium Oxide
Sputtering TargetChemical Name
Chemical Formula
Purity
99.9%
Composition
50/50 wt% HfO2:ZrO2 (63.076/36.924 wt%)
Size
3 inch dia x 0.125 inch th.
EINECS Number
Quantity Available
pcs
CAS Number
Status
Product ID
SPHFZRO3D3T3N
Hazmat
Catalog Number
10418
Description
Comments
Hafnium Zirconium Oxide (HZO) is utilized as a high-k dielectric material and for its ferroelectric properties in advanced CMOS logic and non-volatile memory devices.
HZO targets are used in magnetron sputtering processes to deposit thin films for microelectronic components requiring precise ferroelectric layers.
Used to create high-refractive index layers in multilayer optical coatings for laser applications and specialized mirrors.
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