Excimer laser (short for “excited dimer laser”) is a type of pulsed gas laser that emits intense ultraviolet (UV) light. It operates by using a mixture of a noble gas (such as argon, krypton, or xenon) and a halogen gas (like fluorine or chlorine) to form a short-lived excited dimer (excimer) that produces UV laser emission when it returns to the ground state.
Key features of excimer lasers:
Precise material removal with minimal thermal damage
Common applications include:
UV laser annealing and thin-film processing
Excimer lasers are prized for their ability to precisely pattern and modify materials at microscopic scales, especially in high-tech manufacturing and medical fields.
